WaferSAGE-Wafermap-VQA

Gemma-3 VLM Fine-Tuned
Dataset Size 15.3k Rows
Quality Lift +5.0%

Wafer Map Inspection

Wafer Map Preview

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Ground Truth Label: -

Defect Classification & Morphology

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Spatial Signature & Distribution

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Root Cause & Process Hypotheses

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